Links in this section:

Introduction
Evolution of WDS technique
Basics of WDS
Diffraction
Crystals
Detectors & Geometry
Comparison of EDS and WDS
Qualitative Analysis
Quantitative Analysis
Mapping
Summary

Basics of WDS

The WD spectrometer is fitted on a port of the SEM, usually at an angle inclined to the horizontal so that it provides an identical X-ray take off angle to the ED detector. Although the WD technique often requires a higher SEM beam current than is typically used for ED, the X-ray data is usually acquired from ED and WD simultaneously. If the ED detector is fitted with a variable collimator there is no compromise in performance for either technique.

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