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Summary
EDS offers a routine microanalytical solution for determining nano-scale
chemical variations in the TEM. By looking at a very thin specimen at high
accelerating voltage, the electron-sample interactions are minimized, which
means that X-rays are only generated from a volume of similar diameter to
the electron beam. This allows the study of chemical features which are much
smaller than can be studied in the SEM.
The complex construction of the TEM, combined with the energetic and varied
nature of radiation generated by the beam, offers a challenge to the
designers of EDS systems. An EDS detector for the TEM is a compromise which
offers the best combination of solid angle, take-off angle, spectral
performance and overload protection. Software for the TEM must account for
the specialized requirements of analysis in the TEM including, quantitative
analysis of thin films, drift correction, long dwell time acquisitions, and
high kV excited lines.
Combining these functions, an EDS system can provide the same detailed
information on the nm scale that is provided on the µm scale in the SEM.
This includes the ability to do accurate identification of constituent
elements, or determine elemental concentrations, and collect drift corrected
spectrum image datacubes for complete data reconstruction of maps, linescans,
and spectra.
Selected references on microanalysis in the TEM
Cliff, G. and Lorimer, G.W. (1975) The Quantitative Analysis of Thin
Specimens. J. Microsc. 103:179
Garratt-Reed, A.J. and Bell, D.C. (2003) Energy Dispersive Analysis in the
Electron Microscope. Chapter 6. Royal Microscopical Society Microscopy
Series-49, Bios Scientific Publishers Ltd.
Goldstein, J.I.,
Williams, D.B., and Cliff, G. (1986). Principles of Analytical Electron
Microscopy. Plenum Press. New York. Romig,
A.D. Jr. (1986). Analytical Transmission Electron Microscopy. Metals
Handbook, 9th. edition, 10, American Society for Metals, Metals Park, Ohio.
Scott, V.D. and
Love, G. (1983) Quantitative Electron-Probe Analysis. Chapter 13. John Wiley
and Sons Williams, D. B., and Carter, C.B.(1996)
Transmission
Electron Microscopy, a Textbook for Materials Science. Chapters 35-36.
Plenum Press, New York. Sheridan, P. J. (1989) J. Electr. Microsc. Tech. 11,
41 Oxford
Instruments. (2002) Energy Dispersive X-ray Microanalysis Hardware
Explained. Oxford Intruments Analytical Ltd.
Zaluzec, N.J.
(1979) Introduction to Analytical Electron Microscopy. Plenum Press, New
York.
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