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Energy Dispersive X-ray Microanalysis for the TEM
Introduction
X-ray microanalysis of thin specimens in the Transmission Electron
Microscope (TEM) offers nano-scale information on the chemistry of
materials.
However, the complexity of TEM designs means that the application of energy
dispersive X-ray spectrometers (EDS) to the TEM is a serious technical
challenge. This guide explores some of the major issues which have
influenced the evolution of EDS on the TEM. It also looks at the current
state of instrumentation, and the important requirements for doing
successful EDS on this instrument.
Examples of microanalysis in the TEM are used to demonstrate the standard of
data that can be routinely collected in a TEM with today’s instrumentation.
This data is normally equivalent to that collected in the more common SEM,
although with higher spatial resolution to study much smaller chemical
features.
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