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Summary
Although EDS is most commonly
used for X-ray microanalysis, there are undeniable benefits in using a
wavelength spectrometer to provide increased sensitivity and peak
separation.
The increased resolution of WDS
allows easy identification of peaks with complete confidence compared with
the potential overlaps in the EDS spectrum. Also, WDS can deal with much
higher X-ray intensities and achieve detection limits significantly better
than EDS, which is important for trace element analysis.
In practice, the techniques of
EDS and WDS are complementary. The speed of EDS is used for the initial
survey of a sample, and the resolution and dynamic range of WD is used to
check for overlaps and increase sensitivity for trace elements.
In the past WDS spectrometers
were complex to set up correctly, but modern software now makes WD
straightforward. Comparing WD and ED spectra and combining results is now
routine and easy.
General
References on WDS:
Goldstein, J. I., et al.,
Scanning Electron Microscopy and X-ray Microanalysis, 2nd ed., Plenum Press,
New York (1992).
Scott, V. D., Love, G., and Reed,
S. J. B., Quantitative Electron-Probe Microanalysis, 2nd ed., Ellis Horwood
Limited, Hemel Hempstead, Hertfordshire, England (1995).
Reed, S. J. B., Electron Probe
Microanalysis, 2nd ed., Cambridge University Press (1993).
Chandler, J. A., X-ray
Microanalysis in the Electron Microscope, Elsevier/North Holland Biomedical
Press, Amsterdam (1977).
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